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FOUP Opener
![자산 1.png](https://static.wixstatic.com/media/5560ca_9326b64f393e40d280da9f5218ea77b3~mv2.png/v1/crop/x_0,y_25,w_534,h_1051/fill/w_184,h_335,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/%EC%9E%90%EC%82%B0%201.png)
![cassette adaptor.jpeg](https://static.wixstatic.com/media/5560ca_1d5629ea3e844cdcb136f55730b9afe2~mv2.jpeg/v1/fill/w_143,h_80,al_c,q_80,usm_0.66_1.00_0.01,enc_auto/cassette%20adaptor.jpeg)
8" CASSETTE ADAPTOR
12" FOUP (STANDARD)
![18%22foup.jpeg](https://static.wixstatic.com/media/5560ca_3007d6dfbdcf4480a8c70c44d5e64641~mv2.jpeg/v1/fill/w_179,h_336,al_c,q_80,usm_0.66_1.00_0.01,enc_auto/18%2522foup.jpeg)
18" FOUP
![KakaoTalk_Photo_2020-03-06-13-37-15-19.p](https://static.wixstatic.com/media/5560ca_be8898c87ca845809aae8a90c8f9cab0~mv2.png/v1/crop/x_13,y_0,w_324,h_629/fill/w_184,h_335,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/KakaoTalk_Photo_2020-03-06-13-37-15-19_p.png)
12" FOUP WITH N2 PURGE
![celaning.png](https://static.wixstatic.com/media/5560ca_67663a330a17445e8425e228cfe9bd33~mv2.png/v1/crop/x_18,y_51,w_364,h_636/fill/w_204,h_335,al_c,q_85,usm_0.66_1.00_0.01,enc_auto/celaning.png)
FOR FOUP CLEANING TOOL
(주)로봇앤드디자인의 FOUP Opener는 RS-232 통신 인터페이스를 사용하고, FOUP presence, placement, protrusion sensors와 mapping 기능이 포함되어있습니다. 12” SEMI compliant FOUP, 18” FOUP, 12” ring frame wafer용 MAC FOUP은 개별적으로 설계되었고, 신속한 swap-outs service를 위한 모듈 설계가 되어있습니다.
*Option: adaptor for 8” cassette, RFID, etc.
12” FOUP Opener (ONLY)
(주)로봇앤드디자인의 12” FOUP Opener은 CE, S2, SEMI를 준수하였고, SEMI를 기반으로 모든 12” FOUP과 호환이 가능하고, 8” casette는 adaptor (옵션) 와 호환이 가능합니다. 또한, FOUP pinch point protection기능이 포함되어 있습니다.
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